11/3/2012	10:29:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2012	10:29:32 AM	Recipe started at 10:29 AM
11/3/2012	10:29:32 AM	Helium valve closed
11/3/2012	10:29:32 AM	H2 valve closed
11/3/2012	10:29:32 AM	BCl3 valve closed
11/3/2012	10:29:32 AM	PH3 valve closed
11/3/2012	10:29:32 AM	SiCl4 pre valve closed
11/3/2012	10:29:32 AM	SiCl4 post valve closed
11/3/2012	10:29:32 AM	Main Vac valve closed
11/3/2012	10:29:32 AM	Bypass valve closed
11/3/2012	10:29:32 AM	Bubbler valve closed
11/3/2012	10:29:32 AM	Helium MFC set to  0.000000
11/3/2012	10:29:32 AM	H2 MFC set to  0.000000
11/3/2012	10:29:32 AM	BCl3 MFC set to  0.000000
11/3/2012	10:29:32 AM	PH3 MFC set to  0.000000
11/3/2012	10:29:32 AM	SiCl4 MFC set to  0.000000
11/3/2012	10:29:32 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	10:29:32 AM	Tube furnace set to 0
11/3/2012	10:29:35 AM	H2 valve closed
11/3/2012	10:29:35 AM	BCl3 valve closed
11/3/2012	10:29:35 AM	PH3 valve closed
11/3/2012	10:29:35 AM	SiCl4 pre valve closed
11/3/2012	10:29:35 AM	SiCl4 post valve closed
11/3/2012	10:29:35 AM	Main Vac valve closed
11/3/2012	10:29:35 AM	Bypass valve closed
11/3/2012	10:29:35 AM	Bubbler valve closed
11/3/2012	10:29:35 AM	Helium valve opened
11/3/2012	10:29:35 AM	Helium MFC set to  500.000000
11/3/2012	10:29:35 AM	H2 MFC set to  0.000000
11/3/2012	10:29:35 AM	BCl3 MFC set to  0.000000
11/3/2012	10:29:36 AM	PH3 MFC set to  0.000000
11/3/2012	10:29:36 AM	SiCl4 MFC set to  0.000000
11/3/2012	10:29:36 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	10:29:36 AM	Tube furnace set to 0
11/3/2012	10:30:49 AM	Helium valve closed
11/3/2012	10:30:49 AM	H2 valve closed
11/3/2012	10:30:49 AM	BCl3 valve closed
11/3/2012	10:30:49 AM	PH3 valve closed
11/3/2012	10:30:49 AM	SiCl4 pre valve closed
11/3/2012	10:30:49 AM	SiCl4 post valve closed
11/3/2012	10:30:49 AM	Main Vac valve closed
11/3/2012	10:30:49 AM	Bypass valve closed
11/3/2012	10:30:49 AM	Bubbler valve closed
11/3/2012	10:30:49 AM	Helium MFC set to  0.000000
11/3/2012	10:30:49 AM	H2 MFC set to  0.000000
11/3/2012	10:30:49 AM	BCl3 MFC set to  0.000000
11/3/2012	10:30:49 AM	PH3 MFC set to  0.000000
11/3/2012	10:30:49 AM	SiCl4 MFC set to  0.000000
11/3/2012	10:30:49 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	10:30:49 AM	Tube furnace set to 0
11/3/2012	10:30:50 AM	Run finished at 10:30 AM
11/3/2012	10:30:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2012	10:32:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2012	10:32:39 AM	Recipe started at 10:32 AM
11/3/2012	10:32:39 AM	Helium valve closed
11/3/2012	10:32:39 AM	H2 valve closed
11/3/2012	10:32:39 AM	BCl3 valve closed
11/3/2012	10:32:39 AM	PH3 valve closed
11/3/2012	10:32:39 AM	SiCl4 pre valve closed
11/3/2012	10:32:39 AM	SiCl4 post valve closed
11/3/2012	10:32:39 AM	Main Vac valve closed
11/3/2012	10:32:39 AM	Bubbler valve closed
11/3/2012	10:32:39 AM	Bypass valve opened
11/3/2012	10:32:39 AM	Helium MFC set to  0.000000
11/3/2012	10:32:39 AM	H2 MFC set to  0.000000
11/3/2012	10:32:39 AM	BCl3 MFC set to  0.000000
11/3/2012	10:32:39 AM	PH3 MFC set to  0.000000
11/3/2012	10:32:39 AM	SiCl4 MFC set to  0.000000
11/3/2012	10:32:39 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	10:32:40 AM	Tube furnace set to 0
11/3/2012	10:34:02 AM	Run aborted at 10:34 AM
11/3/2012	10:34:02 AM	Helium valve closed
11/3/2012	10:34:02 AM	H2 valve closed
11/3/2012	10:34:02 AM	BCl3 valve closed
11/3/2012	10:34:02 AM	PH3 valve closed
11/3/2012	10:34:02 AM	SiCl4 pre valve closed
11/3/2012	10:34:02 AM	SiCl4 post valve closed
11/3/2012	10:34:02 AM	Bypass valve closed
11/3/2012	10:34:02 AM	Main Vac valve closed
11/3/2012	10:34:02 AM	Bubbler valve closed
11/3/2012	10:34:02 AM	Helium MFC set to  0.000000
11/3/2012	10:34:02 AM	H2 MFC set to  0.000000
11/3/2012	10:34:02 AM	BCl3 MFC set to  0.000000
11/3/2012	10:34:02 AM	PH3 MFC set to  0.000000
11/3/2012	10:34:02 AM	SiCl4 MFC set to  0.000000
11/3/2012	10:34:02 AM	Tube furnace set to 0
11/3/2012	10:34:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2012	10:34:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2012	10:34:05 AM	Recipe started at 10:34 AM
11/3/2012	10:34:05 AM	Helium valve closed
11/3/2012	10:34:05 AM	H2 valve closed
11/3/2012	10:34:05 AM	BCl3 valve closed
11/3/2012	10:34:05 AM	PH3 valve closed
11/3/2012	10:34:05 AM	SiCl4 pre valve closed
11/3/2012	10:34:05 AM	SiCl4 post valve closed
11/3/2012	10:34:05 AM	Main Vac valve closed
11/3/2012	10:34:05 AM	Bypass valve closed
11/3/2012	10:34:05 AM	Bubbler valve closed
11/3/2012	10:34:05 AM	Helium MFC set to  0.000000
11/3/2012	10:34:05 AM	H2 MFC set to  0.000000
11/3/2012	10:34:05 AM	BCl3 MFC set to  0.000000
11/3/2012	10:34:05 AM	PH3 MFC set to  0.000000
11/3/2012	10:34:05 AM	SiCl4 MFC set to  0.000000
11/3/2012	10:34:05 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	10:34:05 AM	Tube furnace set to 0
11/3/2012	10:34:08 AM	H2 valve closed
11/3/2012	10:34:08 AM	BCl3 valve closed
11/3/2012	10:34:08 AM	PH3 valve closed
11/3/2012	10:34:08 AM	SiCl4 pre valve closed
11/3/2012	10:34:08 AM	SiCl4 post valve closed
11/3/2012	10:34:08 AM	Main Vac valve closed
11/3/2012	10:34:08 AM	Bypass valve closed
11/3/2012	10:34:08 AM	Bubbler valve closed
11/3/2012	10:34:08 AM	Helium valve opened
11/3/2012	10:34:08 AM	Helium MFC set to  500.000000
11/3/2012	10:34:08 AM	H2 MFC set to  0.000000
11/3/2012	10:34:08 AM	BCl3 MFC set to  0.000000
11/3/2012	10:34:08 AM	PH3 MFC set to  0.000000
11/3/2012	10:34:08 AM	SiCl4 MFC set to  0.000000
11/3/2012	10:34:08 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	10:34:08 AM	Tube furnace set to 0
11/3/2012	10:35:11 AM	Helium valve closed
11/3/2012	10:35:11 AM	H2 valve closed
11/3/2012	10:35:11 AM	BCl3 valve closed
11/3/2012	10:35:11 AM	PH3 valve closed
11/3/2012	10:35:11 AM	SiCl4 pre valve closed
11/3/2012	10:35:11 AM	SiCl4 post valve closed
11/3/2012	10:35:11 AM	Main Vac valve closed
11/3/2012	10:35:11 AM	Bypass valve closed
11/3/2012	10:35:11 AM	Bubbler valve closed
11/3/2012	10:35:11 AM	Helium MFC set to  0.000000
11/3/2012	10:35:11 AM	H2 MFC set to  0.000000
11/3/2012	10:35:11 AM	BCl3 MFC set to  0.000000
11/3/2012	10:35:11 AM	PH3 MFC set to  0.000000
11/3/2012	10:35:11 AM	SiCl4 MFC set to  0.000000
11/3/2012	10:35:11 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	10:35:11 AM	Tube furnace set to 0
11/3/2012	10:35:12 AM	Run finished at 10:35 AM
11/3/2012	10:35:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2012	10:36:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2012	10:36:49 AM	Recipe started at 10:36 AM
11/3/2012	10:36:49 AM	Helium valve closed
11/3/2012	10:36:49 AM	H2 valve closed
11/3/2012	10:36:49 AM	BCl3 valve closed
11/3/2012	10:36:49 AM	PH3 valve closed
11/3/2012	10:36:49 AM	SiCl4 pre valve closed
11/3/2012	10:36:49 AM	SiCl4 post valve closed
11/3/2012	10:36:49 AM	Main Vac valve closed
11/3/2012	10:36:49 AM	Bubbler valve closed
11/3/2012	10:36:49 AM	Bypass valve opened
11/3/2012	10:36:49 AM	Helium MFC set to  0.000000
11/3/2012	10:36:49 AM	H2 MFC set to  0.000000
11/3/2012	10:36:49 AM	BCl3 MFC set to  0.000000
11/3/2012	10:36:49 AM	PH3 MFC set to  0.000000
11/3/2012	10:36:49 AM	SiCl4 MFC set to  0.000000
11/3/2012	10:36:49 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	10:36:49 AM	Tube furnace set to 0
11/3/2012	10:38:09 AM	Helium valve closed
11/3/2012	10:38:09 AM	H2 valve closed
11/3/2012	10:38:09 AM	BCl3 valve closed
11/3/2012	10:38:09 AM	PH3 valve closed
11/3/2012	10:38:09 AM	SiCl4 pre valve closed
11/3/2012	10:38:09 AM	SiCl4 post valve closed
11/3/2012	10:38:09 AM	Main Vac valve closed
11/3/2012	10:38:09 AM	Bubbler valve closed
11/3/2012	10:38:09 AM	Bypass valve opened
11/3/2012	10:38:09 AM	Helium MFC set to  0.000000
11/3/2012	10:38:09 AM	H2 MFC set to  0.000000
11/3/2012	10:38:09 AM	BCl3 MFC set to  0.000000
11/3/2012	10:38:09 AM	PH3 MFC set to  0.000000
11/3/2012	10:38:09 AM	SiCl4 MFC set to  0.000000
11/3/2012	10:38:09 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	10:38:09 AM	Tube furnace set to 0
11/3/2012	10:39:09 AM	Helium valve closed
11/3/2012	10:39:09 AM	H2 valve closed
11/3/2012	10:39:09 AM	BCl3 valve closed
11/3/2012	10:39:09 AM	PH3 valve closed
11/3/2012	10:39:09 AM	SiCl4 pre valve closed
11/3/2012	10:39:09 AM	SiCl4 post valve closed
11/3/2012	10:39:09 AM	Bypass valve closed
11/3/2012	10:39:09 AM	Bubbler valve closed
11/3/2012	10:39:09 AM	Main Vac valve opened
11/3/2012	10:39:09 AM	Helium MFC set to  0.000000
11/3/2012	10:39:09 AM	H2 MFC set to  0.000000
11/3/2012	10:39:10 AM	BCl3 MFC set to  0.000000
11/3/2012	10:39:10 AM	PH3 MFC set to  0.000000
11/3/2012	10:39:10 AM	SiCl4 MFC set to  0.000000
11/3/2012	10:39:10 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	10:39:10 AM	Tube furnace set to 0
11/3/2012	10:39:11 AM	Run finished at 10:39 AM
11/3/2012	10:39:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2012	10:42:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2012	10:42:17 AM	Recipe started at 10:42 AM
11/3/2012	10:42:17 AM	Helium valve closed
11/3/2012	10:42:17 AM	H2 valve closed
11/3/2012	10:42:17 AM	BCl3 valve closed
11/3/2012	10:42:17 AM	PH3 valve closed
11/3/2012	10:42:17 AM	SiCl4 pre valve closed
11/3/2012	10:42:17 AM	SiCl4 post valve closed
11/3/2012	10:42:17 AM	Main Vac valve closed
11/3/2012	10:42:17 AM	Bypass valve closed
11/3/2012	10:42:17 AM	Bubbler valve closed
11/3/2012	10:42:17 AM	Helium MFC set to  0.000000
11/3/2012	10:42:17 AM	H2 MFC set to  0.000000
11/3/2012	10:42:17 AM	BCl3 MFC set to  0.000000
11/3/2012	10:42:17 AM	PH3 MFC set to  0.000000
11/3/2012	10:42:17 AM	SiCl4 MFC set to  0.000000
11/3/2012	10:42:17 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	10:42:17 AM	Tube furnace set to 0
11/3/2012	10:42:20 AM	H2 valve closed
11/3/2012	10:42:20 AM	BCl3 valve closed
11/3/2012	10:42:20 AM	PH3 valve closed
11/3/2012	10:42:20 AM	SiCl4 pre valve closed
11/3/2012	10:42:20 AM	SiCl4 post valve closed
11/3/2012	10:42:20 AM	Main Vac valve closed
11/3/2012	10:42:20 AM	Bypass valve closed
11/3/2012	10:42:20 AM	Bubbler valve closed
11/3/2012	10:42:20 AM	Helium valve opened
11/3/2012	10:42:20 AM	Helium MFC set to  500.000000
11/3/2012	10:42:20 AM	H2 MFC set to  0.000000
11/3/2012	10:42:20 AM	BCl3 MFC set to  0.000000
11/3/2012	10:42:20 AM	PH3 MFC set to  0.000000
11/3/2012	10:42:20 AM	SiCl4 MFC set to  0.000000
11/3/2012	10:42:20 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	10:42:21 AM	Tube furnace set to 0
11/3/2012	10:43:35 AM	Helium valve closed
11/3/2012	10:43:35 AM	H2 valve closed
11/3/2012	10:43:35 AM	BCl3 valve closed
11/3/2012	10:43:35 AM	PH3 valve closed
11/3/2012	10:43:35 AM	SiCl4 pre valve closed
11/3/2012	10:43:35 AM	SiCl4 post valve closed
11/3/2012	10:43:35 AM	Main Vac valve closed
11/3/2012	10:43:35 AM	Bypass valve closed
11/3/2012	10:43:35 AM	Bubbler valve closed
11/3/2012	10:43:35 AM	Helium MFC set to  0.000000
11/3/2012	10:43:35 AM	H2 MFC set to  0.000000
11/3/2012	10:43:35 AM	BCl3 MFC set to  0.000000
11/3/2012	10:43:35 AM	PH3 MFC set to  0.000000
11/3/2012	10:43:35 AM	SiCl4 MFC set to  0.000000
11/3/2012	10:43:35 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	10:43:35 AM	Tube furnace set to 0
11/3/2012	10:43:36 AM	Run finished at 10:43 AM
11/3/2012	10:43:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2012	10:45:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2012	10:45:45 AM	Recipe started at 10:45 AM
11/3/2012	10:45:45 AM	Helium valve closed
11/3/2012	10:45:45 AM	H2 valve closed
11/3/2012	10:45:45 AM	BCl3 valve closed
11/3/2012	10:45:45 AM	PH3 valve closed
11/3/2012	10:45:45 AM	SiCl4 pre valve closed
11/3/2012	10:45:45 AM	SiCl4 post valve closed
11/3/2012	10:45:45 AM	Main Vac valve closed
11/3/2012	10:45:45 AM	Bubbler valve closed
11/3/2012	10:45:45 AM	Bypass valve opened
11/3/2012	10:45:45 AM	Helium MFC set to  0.000000
11/3/2012	10:45:45 AM	H2 MFC set to  0.000000
11/3/2012	10:45:45 AM	BCl3 MFC set to  0.000000
11/3/2012	10:45:45 AM	PH3 MFC set to  0.000000
11/3/2012	10:45:45 AM	SiCl4 MFC set to  0.000000
11/3/2012	10:45:45 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	10:45:45 AM	Tube furnace set to 0
11/3/2012	10:46:58 AM	Helium valve closed
11/3/2012	10:46:58 AM	H2 valve closed
11/3/2012	10:46:58 AM	BCl3 valve closed
11/3/2012	10:46:58 AM	PH3 valve closed
11/3/2012	10:46:58 AM	SiCl4 pre valve closed
11/3/2012	10:46:58 AM	SiCl4 post valve closed
11/3/2012	10:46:58 AM	Main Vac valve closed
11/3/2012	10:46:58 AM	Bubbler valve closed
11/3/2012	10:46:58 AM	Bypass valve opened
11/3/2012	10:46:58 AM	Helium MFC set to  0.000000
11/3/2012	10:46:58 AM	H2 MFC set to  0.000000
11/3/2012	10:46:58 AM	BCl3 MFC set to  0.000000
11/3/2012	10:46:58 AM	PH3 MFC set to  0.000000
11/3/2012	10:46:58 AM	SiCl4 MFC set to  0.000000
11/3/2012	10:46:58 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	10:46:58 AM	Tube furnace set to 0
11/3/2012	10:47:58 AM	Helium valve closed
11/3/2012	10:47:58 AM	H2 valve closed
11/3/2012	10:47:59 AM	BCl3 valve closed
11/3/2012	10:47:59 AM	PH3 valve closed
11/3/2012	10:47:59 AM	SiCl4 pre valve closed
11/3/2012	10:47:59 AM	SiCl4 post valve closed
11/3/2012	10:47:59 AM	Bypass valve closed
11/3/2012	10:47:59 AM	Bubbler valve closed
11/3/2012	10:47:59 AM	Main Vac valve opened
11/3/2012	10:47:59 AM	Helium MFC set to  0.000000
11/3/2012	10:47:59 AM	H2 MFC set to  0.000000
11/3/2012	10:47:59 AM	BCl3 MFC set to  0.000000
11/3/2012	10:47:59 AM	PH3 MFC set to  0.000000
11/3/2012	10:47:59 AM	SiCl4 MFC set to  0.000000
11/3/2012	10:47:59 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	10:47:59 AM	Tube furnace set to 0
11/3/2012	10:48:00 AM	Run finished at 10:48 AM
11/3/2012	10:48:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2012	11:19:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/3/2012	11:19:33 AM	Recipe started at 11:19 AM
11/3/2012	11:19:33 AM	Helium valve closed
11/3/2012	11:19:33 AM	H2 valve closed
11/3/2012	11:19:33 AM	BCl3 valve closed
11/3/2012	11:19:33 AM	PH3 valve closed
11/3/2012	11:19:33 AM	SiCl4 pre valve closed
11/3/2012	11:19:33 AM	SiCl4 post valve closed
11/3/2012	11:19:33 AM	Main Vac valve closed
11/3/2012	11:19:33 AM	Bubbler valve closed
11/3/2012	11:19:33 AM	Bypass valve opened
11/3/2012	11:19:33 AM	Helium MFC set to  0.000000
11/3/2012	11:19:33 AM	H2 MFC set to  0.000000
11/3/2012	11:19:33 AM	BCl3 MFC set to  0.000000
11/3/2012	11:19:33 AM	PH3 MFC set to  0.000000
11/3/2012	11:19:33 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:19:33 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:19:33 AM	Tube furnace set to 0
11/3/2012	11:19:33 AM	Helium valve closed
11/3/2012	11:19:33 AM	H2 valve closed
11/3/2012	11:19:33 AM	BCl3 valve closed
11/3/2012	11:19:33 AM	PH3 valve closed
11/3/2012	11:19:33 AM	SiCl4 pre valve closed
11/3/2012	11:19:33 AM	SiCl4 post valve closed
11/3/2012	11:19:33 AM	Main Vac valve closed
11/3/2012	11:19:33 AM	Bubbler valve closed
11/3/2012	11:19:33 AM	Bypass valve opened
11/3/2012	11:19:33 AM	Helium MFC set to  0.000000
11/3/2012	11:19:33 AM	H2 MFC set to  0.000000
11/3/2012	11:19:33 AM	BCl3 MFC set to  0.000000
11/3/2012	11:19:33 AM	PH3 MFC set to  0.000000
11/3/2012	11:19:33 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:19:33 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:19:34 AM	Tube furnace set to 0
11/3/2012	11:19:35 AM	Helium valve closed
11/3/2012	11:19:35 AM	H2 valve closed
11/3/2012	11:19:35 AM	BCl3 valve closed
11/3/2012	11:19:35 AM	PH3 valve closed
11/3/2012	11:19:35 AM	SiCl4 pre valve closed
11/3/2012	11:19:35 AM	SiCl4 post valve closed
11/3/2012	11:19:35 AM	Bypass valve closed
11/3/2012	11:19:35 AM	Bubbler valve closed
11/3/2012	11:19:35 AM	Main Vac valve opened
11/3/2012	11:19:35 AM	Helium MFC set to  0.000000
11/3/2012	11:19:35 AM	H2 MFC set to  0.000000
11/3/2012	11:19:35 AM	BCl3 MFC set to  0.000000
11/3/2012	11:19:35 AM	PH3 MFC set to  0.000000
11/3/2012	11:19:35 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:19:35 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:19:35 AM	Tube furnace set to 0
11/3/2012	11:19:36 AM	H2 valve closed
11/3/2012	11:19:36 AM	BCl3 valve closed
11/3/2012	11:19:36 AM	PH3 valve closed
11/3/2012	11:19:36 AM	SiCl4 pre valve closed
11/3/2012	11:19:36 AM	SiCl4 post valve closed
11/3/2012	11:19:36 AM	Bypass valve closed
11/3/2012	11:19:36 AM	Bubbler valve closed
11/3/2012	11:19:36 AM	Helium valve opened
11/3/2012	11:19:36 AM	Main Vac valve opened
11/3/2012	11:19:36 AM	Helium MFC set to  20.000000
11/3/2012	11:19:36 AM	H2 MFC set to  0.000000
11/3/2012	11:19:36 AM	BCl3 MFC set to  0.000000
11/3/2012	11:19:36 AM	PH3 MFC set to  0.000000
11/3/2012	11:19:36 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:19:36 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:19:37 AM	Tube furnace set to 0
11/3/2012	11:20:07 AM	Helium valve closed
11/3/2012	11:20:07 AM	H2 valve closed
11/3/2012	11:20:07 AM	BCl3 valve closed
11/3/2012	11:20:07 AM	PH3 valve closed
11/3/2012	11:20:07 AM	SiCl4 pre valve closed
11/3/2012	11:20:07 AM	SiCl4 post valve closed
11/3/2012	11:20:07 AM	Bypass valve closed
11/3/2012	11:20:07 AM	Bubbler valve closed
11/3/2012	11:20:07 AM	Main Vac valve opened
11/3/2012	11:20:07 AM	Helium MFC set to  0.000000
11/3/2012	11:20:07 AM	H2 MFC set to  0.000000
11/3/2012	11:20:07 AM	BCl3 MFC set to  0.000000
11/3/2012	11:20:07 AM	PH3 MFC set to  0.000000
11/3/2012	11:20:07 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:20:07 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:20:07 AM	Tube furnace set to 0
11/3/2012	11:20:37 AM	H2 valve closed
11/3/2012	11:20:37 AM	BCl3 valve closed
11/3/2012	11:20:37 AM	PH3 valve closed
11/3/2012	11:20:37 AM	SiCl4 pre valve closed
11/3/2012	11:20:37 AM	SiCl4 post valve closed
11/3/2012	11:20:37 AM	Bypass valve closed
11/3/2012	11:20:37 AM	Bubbler valve closed
11/3/2012	11:20:37 AM	Helium valve opened
11/3/2012	11:20:37 AM	Main Vac valve opened
11/3/2012	11:20:37 AM	Helium MFC set to  20.000000
11/3/2012	11:20:37 AM	H2 MFC set to  0.000000
11/3/2012	11:20:37 AM	BCl3 MFC set to  0.000000
11/3/2012	11:20:37 AM	PH3 MFC set to  0.000000
11/3/2012	11:20:37 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:20:37 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:20:37 AM	Tube furnace set to 0
11/3/2012	11:21:07 AM	Helium valve closed
11/3/2012	11:21:07 AM	H2 valve closed
11/3/2012	11:21:07 AM	BCl3 valve closed
11/3/2012	11:21:07 AM	PH3 valve closed
11/3/2012	11:21:07 AM	SiCl4 pre valve closed
11/3/2012	11:21:07 AM	SiCl4 post valve closed
11/3/2012	11:21:07 AM	Bypass valve closed
11/3/2012	11:21:07 AM	Bubbler valve closed
11/3/2012	11:21:07 AM	Main Vac valve opened
11/3/2012	11:21:07 AM	Helium MFC set to  0.000000
11/3/2012	11:21:07 AM	H2 MFC set to  0.000000
11/3/2012	11:21:07 AM	BCl3 MFC set to  0.000000
11/3/2012	11:21:07 AM	PH3 MFC set to  0.000000
11/3/2012	11:21:07 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:21:07 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:21:07 AM	Tube furnace set to 0
11/3/2012	11:21:37 AM	H2 valve closed
11/3/2012	11:21:37 AM	BCl3 valve closed
11/3/2012	11:21:37 AM	PH3 valve closed
11/3/2012	11:21:37 AM	SiCl4 pre valve closed
11/3/2012	11:21:37 AM	SiCl4 post valve closed
11/3/2012	11:21:37 AM	Bypass valve closed
11/3/2012	11:21:37 AM	Bubbler valve closed
11/3/2012	11:21:37 AM	Helium valve opened
11/3/2012	11:21:37 AM	Main Vac valve opened
11/3/2012	11:21:37 AM	Helium MFC set to  20.000000
11/3/2012	11:21:37 AM	H2 MFC set to  0.000000
11/3/2012	11:21:37 AM	BCl3 MFC set to  0.000000
11/3/2012	11:21:37 AM	PH3 MFC set to  0.000000
11/3/2012	11:21:37 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:21:37 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:21:38 AM	Tube furnace set to 0
11/3/2012	11:22:08 AM	Helium valve closed
11/3/2012	11:22:08 AM	H2 valve closed
11/3/2012	11:22:08 AM	BCl3 valve closed
11/3/2012	11:22:08 AM	PH3 valve closed
11/3/2012	11:22:08 AM	SiCl4 pre valve closed
11/3/2012	11:22:08 AM	SiCl4 post valve closed
11/3/2012	11:22:08 AM	Bypass valve closed
11/3/2012	11:22:08 AM	Bubbler valve closed
11/3/2012	11:22:08 AM	Main Vac valve opened
11/3/2012	11:22:08 AM	Helium MFC set to  0.000000
11/3/2012	11:22:08 AM	H2 MFC set to  0.000000
11/3/2012	11:22:08 AM	BCl3 MFC set to  0.000000
11/3/2012	11:22:08 AM	PH3 MFC set to  0.000000
11/3/2012	11:22:08 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:22:08 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:22:08 AM	Tube furnace set to 0
11/3/2012	11:22:38 AM	H2 valve closed
11/3/2012	11:22:38 AM	BCl3 valve closed
11/3/2012	11:22:38 AM	PH3 valve closed
11/3/2012	11:22:38 AM	SiCl4 pre valve closed
11/3/2012	11:22:38 AM	SiCl4 post valve closed
11/3/2012	11:22:38 AM	Bypass valve closed
11/3/2012	11:22:38 AM	Bubbler valve closed
11/3/2012	11:22:38 AM	Helium valve opened
11/3/2012	11:22:38 AM	Main Vac valve opened
11/3/2012	11:22:38 AM	Helium MFC set to  20.000000
11/3/2012	11:22:38 AM	H2 MFC set to  0.000000
11/3/2012	11:22:38 AM	BCl3 MFC set to  0.000000
11/3/2012	11:22:38 AM	PH3 MFC set to  0.000000
11/3/2012	11:22:38 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:22:38 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:22:38 AM	Tube furnace set to 0
11/3/2012	11:23:08 AM	Helium valve closed
11/3/2012	11:23:08 AM	H2 valve closed
11/3/2012	11:23:08 AM	BCl3 valve closed
11/3/2012	11:23:08 AM	PH3 valve closed
11/3/2012	11:23:08 AM	SiCl4 pre valve closed
11/3/2012	11:23:08 AM	SiCl4 post valve closed
11/3/2012	11:23:08 AM	Bypass valve closed
11/3/2012	11:23:08 AM	Bubbler valve closed
11/3/2012	11:23:08 AM	Main Vac valve opened
11/3/2012	11:23:08 AM	Helium MFC set to  0.000000
11/3/2012	11:23:08 AM	H2 MFC set to  0.000000
11/3/2012	11:23:08 AM	BCl3 MFC set to  0.000000
11/3/2012	11:23:08 AM	PH3 MFC set to  0.000000
11/3/2012	11:23:08 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:23:08 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:23:08 AM	Tube furnace set to 0
11/3/2012	11:23:38 AM	H2 valve closed
11/3/2012	11:23:38 AM	BCl3 valve closed
11/3/2012	11:23:38 AM	PH3 valve closed
11/3/2012	11:23:38 AM	SiCl4 pre valve closed
11/3/2012	11:23:38 AM	SiCl4 post valve closed
11/3/2012	11:23:38 AM	Bypass valve closed
11/3/2012	11:23:38 AM	Bubbler valve closed
11/3/2012	11:23:38 AM	Helium valve opened
11/3/2012	11:23:38 AM	Main Vac valve opened
11/3/2012	11:23:38 AM	Helium MFC set to  20.000000
11/3/2012	11:23:38 AM	H2 MFC set to  0.000000
11/3/2012	11:23:38 AM	BCl3 MFC set to  0.000000
11/3/2012	11:23:38 AM	PH3 MFC set to  0.000000
11/3/2012	11:23:38 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:23:38 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:23:39 AM	Tube furnace set to 0
11/3/2012	11:24:09 AM	Helium valve closed
11/3/2012	11:24:09 AM	H2 valve closed
11/3/2012	11:24:09 AM	BCl3 valve closed
11/3/2012	11:24:09 AM	PH3 valve closed
11/3/2012	11:24:09 AM	SiCl4 pre valve closed
11/3/2012	11:24:09 AM	SiCl4 post valve closed
11/3/2012	11:24:09 AM	Bypass valve closed
11/3/2012	11:24:09 AM	Bubbler valve closed
11/3/2012	11:24:09 AM	Main Vac valve opened
11/3/2012	11:24:09 AM	Helium MFC set to  0.000000
11/3/2012	11:24:09 AM	H2 MFC set to  0.000000
11/3/2012	11:24:09 AM	BCl3 MFC set to  0.000000
11/3/2012	11:24:09 AM	PH3 MFC set to  0.000000
11/3/2012	11:24:09 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:24:09 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:24:09 AM	Tube furnace set to 0
11/3/2012	11:24:39 AM	H2 valve closed
11/3/2012	11:24:39 AM	BCl3 valve closed
11/3/2012	11:24:39 AM	PH3 valve closed
11/3/2012	11:24:39 AM	SiCl4 pre valve closed
11/3/2012	11:24:39 AM	SiCl4 post valve closed
11/3/2012	11:24:39 AM	Bypass valve closed
11/3/2012	11:24:39 AM	Bubbler valve closed
11/3/2012	11:24:39 AM	Helium valve opened
11/3/2012	11:24:39 AM	Main Vac valve opened
11/3/2012	11:24:39 AM	Helium MFC set to  20.000000
11/3/2012	11:24:39 AM	H2 MFC set to  0.000000
11/3/2012	11:24:39 AM	BCl3 MFC set to  0.000000
11/3/2012	11:24:39 AM	PH3 MFC set to  0.000000
11/3/2012	11:24:39 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:24:39 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:24:39 AM	Tube furnace set to 0
11/3/2012	11:25:09 AM	Helium valve closed
11/3/2012	11:25:09 AM	H2 valve closed
11/3/2012	11:25:09 AM	BCl3 valve closed
11/3/2012	11:25:09 AM	PH3 valve closed
11/3/2012	11:25:09 AM	SiCl4 pre valve closed
11/3/2012	11:25:09 AM	SiCl4 post valve closed
11/3/2012	11:25:09 AM	Bypass valve closed
11/3/2012	11:25:09 AM	Bubbler valve closed
11/3/2012	11:25:09 AM	Main Vac valve opened
11/3/2012	11:25:09 AM	Helium MFC set to  0.000000
11/3/2012	11:25:09 AM	H2 MFC set to  0.000000
11/3/2012	11:25:09 AM	BCl3 MFC set to  0.000000
11/3/2012	11:25:09 AM	PH3 MFC set to  0.000000
11/3/2012	11:25:09 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:25:09 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:25:09 AM	Tube furnace set to 0
11/3/2012	11:25:39 AM	H2 valve closed
11/3/2012	11:25:39 AM	BCl3 valve closed
11/3/2012	11:25:39 AM	PH3 valve closed
11/3/2012	11:25:39 AM	SiCl4 pre valve closed
11/3/2012	11:25:39 AM	SiCl4 post valve closed
11/3/2012	11:25:39 AM	Bypass valve closed
11/3/2012	11:25:39 AM	Bubbler valve closed
11/3/2012	11:25:39 AM	Helium valve opened
11/3/2012	11:25:39 AM	Main Vac valve opened
11/3/2012	11:25:39 AM	Helium MFC set to  20.000000
11/3/2012	11:25:39 AM	H2 MFC set to  0.000000
11/3/2012	11:25:39 AM	BCl3 MFC set to  0.000000
11/3/2012	11:25:39 AM	PH3 MFC set to  0.000000
11/3/2012	11:25:39 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:25:39 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:25:40 AM	Tube furnace set to 0
11/3/2012	11:26:10 AM	Helium valve closed
11/3/2012	11:26:10 AM	H2 valve closed
11/3/2012	11:26:10 AM	BCl3 valve closed
11/3/2012	11:26:10 AM	PH3 valve closed
11/3/2012	11:26:10 AM	SiCl4 pre valve closed
11/3/2012	11:26:10 AM	SiCl4 post valve closed
11/3/2012	11:26:10 AM	Bypass valve closed
11/3/2012	11:26:10 AM	Bubbler valve closed
11/3/2012	11:26:10 AM	Main Vac valve opened
11/3/2012	11:26:10 AM	Helium MFC set to  0.000000
11/3/2012	11:26:10 AM	H2 MFC set to  0.000000
11/3/2012	11:26:10 AM	BCl3 MFC set to  0.000000
11/3/2012	11:26:10 AM	PH3 MFC set to  0.000000
11/3/2012	11:26:10 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:26:10 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:26:10 AM	Tube furnace set to 0
11/3/2012	11:26:40 AM	H2 valve closed
11/3/2012	11:26:40 AM	BCl3 valve closed
11/3/2012	11:26:40 AM	PH3 valve closed
11/3/2012	11:26:40 AM	SiCl4 pre valve closed
11/3/2012	11:26:40 AM	SiCl4 post valve closed
11/3/2012	11:26:40 AM	Bypass valve closed
11/3/2012	11:26:40 AM	Bubbler valve closed
11/3/2012	11:26:40 AM	Helium valve opened
11/3/2012	11:26:40 AM	Main Vac valve opened
11/3/2012	11:26:40 AM	Helium MFC set to  20.000000
11/3/2012	11:26:40 AM	H2 MFC set to  0.000000
11/3/2012	11:26:40 AM	BCl3 MFC set to  0.000000
11/3/2012	11:26:40 AM	PH3 MFC set to  0.000000
11/3/2012	11:26:40 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:26:40 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:26:40 AM	Tube furnace set to 0
11/3/2012	11:27:10 AM	Helium valve closed
11/3/2012	11:27:10 AM	H2 valve closed
11/3/2012	11:27:10 AM	BCl3 valve closed
11/3/2012	11:27:10 AM	PH3 valve closed
11/3/2012	11:27:10 AM	SiCl4 pre valve closed
11/3/2012	11:27:10 AM	SiCl4 post valve closed
11/3/2012	11:27:10 AM	Bypass valve closed
11/3/2012	11:27:10 AM	Bubbler valve closed
11/3/2012	11:27:10 AM	Main Vac valve opened
11/3/2012	11:27:10 AM	Helium MFC set to  0.000000
11/3/2012	11:27:10 AM	H2 MFC set to  0.000000
11/3/2012	11:27:10 AM	BCl3 MFC set to  0.000000
11/3/2012	11:27:10 AM	PH3 MFC set to  0.000000
11/3/2012	11:27:10 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:27:10 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:27:10 AM	Tube furnace set to 0
11/3/2012	11:27:40 AM	H2 valve closed
11/3/2012	11:27:40 AM	BCl3 valve closed
11/3/2012	11:27:40 AM	PH3 valve closed
11/3/2012	11:27:40 AM	SiCl4 pre valve closed
11/3/2012	11:27:40 AM	SiCl4 post valve closed
11/3/2012	11:27:40 AM	Bypass valve closed
11/3/2012	11:27:40 AM	Bubbler valve closed
11/3/2012	11:27:40 AM	Helium valve opened
11/3/2012	11:27:40 AM	Main Vac valve opened
11/3/2012	11:27:40 AM	Helium MFC set to  20.000000
11/3/2012	11:27:40 AM	H2 MFC set to  0.000000
11/3/2012	11:27:40 AM	BCl3 MFC set to  0.000000
11/3/2012	11:27:40 AM	PH3 MFC set to  0.000000
11/3/2012	11:27:40 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:27:40 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:27:41 AM	Tube furnace set to 0
11/3/2012	11:28:11 AM	Helium valve closed
11/3/2012	11:28:11 AM	H2 valve closed
11/3/2012	11:28:11 AM	BCl3 valve closed
11/3/2012	11:28:11 AM	PH3 valve closed
11/3/2012	11:28:11 AM	SiCl4 pre valve closed
11/3/2012	11:28:11 AM	SiCl4 post valve closed
11/3/2012	11:28:11 AM	Bypass valve closed
11/3/2012	11:28:11 AM	Bubbler valve closed
11/3/2012	11:28:11 AM	Main Vac valve opened
11/3/2012	11:28:11 AM	Helium MFC set to  0.000000
11/3/2012	11:28:11 AM	H2 MFC set to  0.000000
11/3/2012	11:28:11 AM	BCl3 MFC set to  0.000000
11/3/2012	11:28:11 AM	PH3 MFC set to  0.000000
11/3/2012	11:28:11 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:28:11 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:28:11 AM	Tube furnace set to 0
11/3/2012	11:28:41 AM	H2 valve closed
11/3/2012	11:28:41 AM	BCl3 valve closed
11/3/2012	11:28:41 AM	PH3 valve closed
11/3/2012	11:28:41 AM	SiCl4 pre valve closed
11/3/2012	11:28:41 AM	SiCl4 post valve closed
11/3/2012	11:28:41 AM	Bypass valve closed
11/3/2012	11:28:41 AM	Bubbler valve closed
11/3/2012	11:28:41 AM	Helium valve opened
11/3/2012	11:28:41 AM	Main Vac valve opened
11/3/2012	11:28:41 AM	Helium MFC set to  20.000000
11/3/2012	11:28:41 AM	H2 MFC set to  0.000000
11/3/2012	11:28:41 AM	BCl3 MFC set to  0.000000
11/3/2012	11:28:41 AM	PH3 MFC set to  0.000000
11/3/2012	11:28:41 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:28:41 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:28:41 AM	Tube furnace set to 0
11/3/2012	11:29:11 AM	Helium valve closed
11/3/2012	11:29:11 AM	H2 valve closed
11/3/2012	11:29:11 AM	BCl3 valve closed
11/3/2012	11:29:11 AM	PH3 valve closed
11/3/2012	11:29:11 AM	SiCl4 pre valve closed
11/3/2012	11:29:11 AM	SiCl4 post valve closed
11/3/2012	11:29:11 AM	Bypass valve closed
11/3/2012	11:29:11 AM	Bubbler valve closed
11/3/2012	11:29:11 AM	Main Vac valve opened
11/3/2012	11:29:11 AM	Helium MFC set to  0.000000
11/3/2012	11:29:11 AM	H2 MFC set to  0.000000
11/3/2012	11:29:11 AM	BCl3 MFC set to  0.000000
11/3/2012	11:29:11 AM	PH3 MFC set to  0.000000
11/3/2012	11:29:11 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:29:11 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:29:11 AM	Tube furnace set to 0
11/3/2012	11:29:12 AM	Run finished at 11:29 AM
11/3/2012	11:29:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/3/2012	11:33:50 AM	Main Vac valve closed
11/3/2012	11:34:03 AM	Main Vac valve opened
11/3/2012	11:35:21 AM	Recipe started at 11:35 AM
11/3/2012	11:35:21 AM	Helium valve closed
11/3/2012	11:35:21 AM	H2 valve closed
11/3/2012	11:35:21 AM	BCl3 valve closed
11/3/2012	11:35:21 AM	PH3 valve closed
11/3/2012	11:35:21 AM	SiCl4 pre valve closed
11/3/2012	11:35:21 AM	SiCl4 post valve closed
11/3/2012	11:35:21 AM	Main Vac valve closed
11/3/2012	11:35:21 AM	Bypass valve closed
11/3/2012	11:35:21 AM	Bubbler valve closed
11/3/2012	11:35:21 AM	Helium MFC set to  0.000000
11/3/2012	11:35:21 AM	H2 MFC set to  0.000000
11/3/2012	11:35:21 AM	BCl3 MFC set to  0.000000
11/3/2012	11:35:21 AM	PH3 MFC set to  0.000000
11/3/2012	11:35:21 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:35:21 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:35:22 AM	Tube furnace set to 0
11/3/2012	11:35:25 AM	Helium valve closed
11/3/2012	11:35:25 AM	BCl3 valve closed
11/3/2012	11:35:25 AM	PH3 valve closed
11/3/2012	11:35:25 AM	SiCl4 pre valve closed
11/3/2012	11:35:25 AM	SiCl4 post valve closed
11/3/2012	11:35:25 AM	Main Vac valve closed
11/3/2012	11:35:25 AM	Bypass valve closed
11/3/2012	11:35:25 AM	Bubbler valve closed
11/3/2012	11:35:25 AM	H2 valve opened
11/3/2012	11:35:25 AM	Helium MFC set to  0.000000
11/3/2012	11:35:25 AM	H2 MFC set to  500.000000
11/3/2012	11:35:25 AM	BCl3 MFC set to  0.000000
11/3/2012	11:35:25 AM	PH3 MFC set to  0.000000
11/3/2012	11:35:25 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:35:25 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:35:25 AM	Tube furnace set to 0
11/3/2012	11:36:42 AM	Helium valve closed
11/3/2012	11:36:42 AM	BCl3 valve closed
11/3/2012	11:36:42 AM	PH3 valve closed
11/3/2012	11:36:42 AM	SiCl4 pre valve closed
11/3/2012	11:36:42 AM	SiCl4 post valve closed
11/3/2012	11:36:42 AM	Main Vac valve closed
11/3/2012	11:36:42 AM	Bypass valve closed
11/3/2012	11:36:42 AM	H2 valve opened
11/3/2012	11:36:42 AM	Bubbler valve opened
11/3/2012	11:36:42 AM	Helium MFC set to  0.000000
11/3/2012	11:36:42 AM	H2 MFC set to  500.000000
11/3/2012	11:36:42 AM	BCl3 MFC set to  0.000000
11/3/2012	11:36:42 AM	PH3 MFC set to  0.000000
11/3/2012	11:36:42 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:36:42 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:36:43 AM	Tube furnace set to 0
11/3/2012	11:36:44 AM	Helium valve closed
11/3/2012	11:36:44 AM	BCl3 valve closed
11/3/2012	11:36:44 AM	PH3 valve closed
11/3/2012	11:36:44 AM	SiCl4 pre valve closed
11/3/2012	11:36:44 AM	SiCl4 post valve closed
11/3/2012	11:36:44 AM	Main Vac valve closed
11/3/2012	11:36:44 AM	Bypass valve closed
11/3/2012	11:36:44 AM	H2 valve opened
11/3/2012	11:36:44 AM	Bubbler valve opened
11/3/2012	11:36:44 AM	Helium MFC set to  0.000000
11/3/2012	11:36:44 AM	H2 MFC set to  500.000000
11/3/2012	11:36:44 AM	BCl3 MFC set to  0.000000
11/3/2012	11:36:44 AM	PH3 MFC set to  0.000000
11/3/2012	11:36:44 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:36:44 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:36:44 AM	Tube furnace set to 1000
11/3/2012	11:56:44 AM	Helium valve closed
11/3/2012	11:56:44 AM	PH3 valve closed
11/3/2012	11:56:44 AM	Main Vac valve closed
11/3/2012	11:56:44 AM	Bypass valve closed
11/3/2012	11:56:44 AM	H2 valve opened
11/3/2012	11:56:44 AM	BCl3 valve opened
11/3/2012	11:56:44 AM	SiCl4 pre valve opened
11/3/2012	11:56:44 AM	SiCl4 post valve opened
11/3/2012	11:56:44 AM	Bubbler valve opened
11/3/2012	11:56:44 AM	Helium MFC set to  0.000000
11/3/2012	11:56:44 AM	H2 MFC set to  450.000000
11/3/2012	11:56:44 AM	BCl3 MFC set to  1.300000
11/3/2012	11:56:44 AM	PH3 MFC set to  0.000000
11/3/2012	11:56:44 AM	SiCl4 MFC set to  50.000000
11/3/2012	11:56:44 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:56:44 AM	Tube furnace set to 1000
11/3/2012	11:56:44 AM	Helium valve closed
11/3/2012	11:56:44 AM	H2 valve closed
11/3/2012	11:56:44 AM	BCl3 valve closed
11/3/2012	11:56:44 AM	PH3 valve closed
11/3/2012	11:56:44 AM	SiCl4 pre valve closed
11/3/2012	11:56:44 AM	SiCl4 post valve closed
11/3/2012	11:56:44 AM	Main Vac valve closed
11/3/2012	11:56:44 AM	Bubbler valve closed
11/3/2012	11:56:44 AM	Bypass valve closed
11/3/2012	11:56:44 AM	Helium MFC set to  0.000000
11/3/2012	11:56:44 AM	H2 MFC set to  0.000000
11/3/2012	11:56:44 AM	BCl3 MFC set to  0.000000
11/3/2012	11:56:44 AM	PH3 MFC set to  0.000000
11/3/2012	11:56:44 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:56:44 AM	Bypass solenoid MFC set to  760.000000
11/3/2012	11:56:44 AM	Tube furnace set to 0
11/3/2012	11:56:44 AM	Baratron reads 626.985583 Torr and NaOH valve is open.  Emergency exit.
11/3/2012	11:57:01 AM	Run aborted at 11:57 AM
11/3/2012	11:58:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/3/2012	11:58:05 AM	Recipe started at 11:58 AM
11/3/2012	11:58:05 AM	Helium valve closed
11/3/2012	11:58:05 AM	H2 valve closed
11/3/2012	11:58:05 AM	BCl3 valve closed
11/3/2012	11:58:05 AM	PH3 valve closed
11/3/2012	11:58:05 AM	SiCl4 pre valve closed
11/3/2012	11:58:05 AM	SiCl4 post valve closed
11/3/2012	11:58:05 AM	Main Vac valve closed
11/3/2012	11:58:05 AM	Bypass valve closed
11/3/2012	11:58:05 AM	Bubbler valve closed
11/3/2012	11:58:05 AM	Helium MFC set to  0.000000
11/3/2012	11:58:05 AM	H2 MFC set to  0.000000
11/3/2012	11:58:05 AM	BCl3 MFC set to  0.000000
11/3/2012	11:58:05 AM	PH3 MFC set to  0.000000
11/3/2012	11:58:05 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:58:05 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:58:06 AM	Tube furnace set to 0
11/3/2012	11:58:06 AM	Run finished at 11:58 AM
11/3/2012	11:58:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/3/2012	11:58:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2012	11:58:21 AM	Recipe started at 11:58 AM
11/3/2012	11:58:21 AM	Helium valve closed
11/3/2012	11:58:21 AM	H2 valve closed
11/3/2012	11:58:21 AM	BCl3 valve closed
11/3/2012	11:58:21 AM	PH3 valve closed
11/3/2012	11:58:21 AM	SiCl4 pre valve closed
11/3/2012	11:58:21 AM	SiCl4 post valve closed
11/3/2012	11:58:21 AM	Main Vac valve closed
11/3/2012	11:58:21 AM	Bypass valve closed
11/3/2012	11:58:21 AM	Bubbler valve closed
11/3/2012	11:58:21 AM	Helium MFC set to  0.000000
11/3/2012	11:58:21 AM	H2 MFC set to  0.000000
11/3/2012	11:58:21 AM	BCl3 MFC set to  0.000000
11/3/2012	11:58:21 AM	PH3 MFC set to  0.000000
11/3/2012	11:58:21 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:58:21 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:58:21 AM	Tube furnace set to 0
11/3/2012	11:58:24 AM	H2 valve closed
11/3/2012	11:58:24 AM	BCl3 valve closed
11/3/2012	11:58:24 AM	PH3 valve closed
11/3/2012	11:58:24 AM	SiCl4 pre valve closed
11/3/2012	11:58:24 AM	SiCl4 post valve closed
11/3/2012	11:58:24 AM	Main Vac valve closed
11/3/2012	11:58:24 AM	Bypass valve closed
11/3/2012	11:58:24 AM	Bubbler valve closed
11/3/2012	11:58:24 AM	Helium valve opened
11/3/2012	11:58:24 AM	Helium MFC set to  500.000000
11/3/2012	11:58:24 AM	H2 MFC set to  0.000000
11/3/2012	11:58:24 AM	BCl3 MFC set to  0.000000
11/3/2012	11:58:24 AM	PH3 MFC set to  0.000000
11/3/2012	11:58:24 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:58:24 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:58:25 AM	Tube furnace set to 0
11/3/2012	11:58:34 AM	Helium valve closed
11/3/2012	11:58:34 AM	H2 valve closed
11/3/2012	11:58:34 AM	BCl3 valve closed
11/3/2012	11:58:34 AM	PH3 valve closed
11/3/2012	11:58:34 AM	SiCl4 pre valve closed
11/3/2012	11:58:34 AM	SiCl4 post valve closed
11/3/2012	11:58:34 AM	Main Vac valve closed
11/3/2012	11:58:34 AM	Bypass valve closed
11/3/2012	11:58:34 AM	Bubbler valve closed
11/3/2012	11:58:34 AM	Helium MFC set to  0.000000
11/3/2012	11:58:34 AM	H2 MFC set to  0.000000
11/3/2012	11:58:34 AM	BCl3 MFC set to  0.000000
11/3/2012	11:58:34 AM	PH3 MFC set to  0.000000
11/3/2012	11:58:34 AM	SiCl4 MFC set to  0.000000
11/3/2012	11:58:34 AM	Bypass solenoid MFC set to  0.000000
11/3/2012	11:58:35 AM	Tube furnace set to 0
11/3/2012	11:58:36 AM	Run finished at 11:58 AM
11/3/2012	11:58:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2012	12:25:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2012	12:25:05 PM	Recipe started at 12:25 PM
11/3/2012	12:25:05 PM	Helium valve closed
11/3/2012	12:25:05 PM	H2 valve closed
11/3/2012	12:25:05 PM	BCl3 valve closed
11/3/2012	12:25:05 PM	PH3 valve closed
11/3/2012	12:25:05 PM	SiCl4 pre valve closed
11/3/2012	12:25:05 PM	SiCl4 post valve closed
11/3/2012	12:25:05 PM	Main Vac valve closed
11/3/2012	12:25:05 PM	Bubbler valve closed
11/3/2012	12:25:05 PM	Bypass valve opened
11/3/2012	12:25:05 PM	Helium MFC set to  0.000000
11/3/2012	12:25:05 PM	H2 MFC set to  0.000000
11/3/2012	12:25:05 PM	BCl3 MFC set to  0.000000
11/3/2012	12:25:05 PM	PH3 MFC set to  0.000000
11/3/2012	12:25:05 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:25:05 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:25:05 PM	Tube furnace set to 0
11/3/2012	12:25:55 PM	Helium valve closed
11/3/2012	12:25:55 PM	H2 valve closed
11/3/2012	12:25:55 PM	BCl3 valve closed
11/3/2012	12:25:55 PM	PH3 valve closed
11/3/2012	12:25:55 PM	SiCl4 pre valve closed
11/3/2012	12:25:55 PM	SiCl4 post valve closed
11/3/2012	12:25:55 PM	Main Vac valve closed
11/3/2012	12:25:55 PM	Bubbler valve closed
11/3/2012	12:25:55 PM	Bypass valve opened
11/3/2012	12:25:55 PM	Helium MFC set to  0.000000
11/3/2012	12:25:55 PM	H2 MFC set to  0.000000
11/3/2012	12:25:55 PM	BCl3 MFC set to  0.000000
11/3/2012	12:25:55 PM	PH3 MFC set to  0.000000
11/3/2012	12:25:55 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:25:55 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:25:55 PM	Tube furnace set to 0
11/3/2012	12:26:55 PM	Helium valve closed
11/3/2012	12:26:55 PM	H2 valve closed
11/3/2012	12:26:55 PM	BCl3 valve closed
11/3/2012	12:26:55 PM	PH3 valve closed
11/3/2012	12:26:55 PM	SiCl4 pre valve closed
11/3/2012	12:26:55 PM	SiCl4 post valve closed
11/3/2012	12:26:55 PM	Bypass valve closed
11/3/2012	12:26:55 PM	Bubbler valve closed
11/3/2012	12:26:55 PM	Main Vac valve opened
11/3/2012	12:26:55 PM	Helium MFC set to  0.000000
11/3/2012	12:26:55 PM	H2 MFC set to  0.000000
11/3/2012	12:26:55 PM	BCl3 MFC set to  0.000000
11/3/2012	12:26:55 PM	PH3 MFC set to  0.000000
11/3/2012	12:26:55 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:26:55 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:26:55 PM	Tube furnace set to 0
11/3/2012	12:26:56 PM	Run finished at 12:26 PM
11/3/2012	12:26:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2012	12:27:39 PM	SiCl4 MFC set to  25.000000
11/3/2012	12:27:43 PM	SiCl4 post valve opened
11/3/2012	12:27:45 PM	SiCl4 post valve closed
11/3/2012	12:28:12 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:28:15 PM	Bypass valve opened
11/3/2012	12:28:16 PM	Main Vac valve closed
11/3/2012	12:28:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2012	12:28:51 PM	Recipe started at 12:28 PM
11/3/2012	12:28:51 PM	Helium valve closed
11/3/2012	12:28:51 PM	H2 valve closed
11/3/2012	12:28:51 PM	BCl3 valve closed
11/3/2012	12:28:51 PM	PH3 valve closed
11/3/2012	12:28:51 PM	SiCl4 pre valve closed
11/3/2012	12:28:51 PM	SiCl4 post valve closed
11/3/2012	12:28:51 PM	Main Vac valve closed
11/3/2012	12:28:51 PM	Bypass valve closed
11/3/2012	12:28:51 PM	Bubbler valve closed
11/3/2012	12:28:51 PM	Helium MFC set to  0.000000
11/3/2012	12:28:51 PM	H2 MFC set to  0.000000
11/3/2012	12:28:51 PM	BCl3 MFC set to  0.000000
11/3/2012	12:28:51 PM	PH3 MFC set to  0.000000
11/3/2012	12:28:51 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:28:51 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:28:52 PM	Tube furnace set to 0
11/3/2012	12:28:55 PM	H2 valve closed
11/3/2012	12:28:55 PM	BCl3 valve closed
11/3/2012	12:28:55 PM	PH3 valve closed
11/3/2012	12:28:55 PM	SiCl4 pre valve closed
11/3/2012	12:28:55 PM	SiCl4 post valve closed
11/3/2012	12:28:55 PM	Main Vac valve closed
11/3/2012	12:28:55 PM	Bypass valve closed
11/3/2012	12:28:55 PM	Bubbler valve closed
11/3/2012	12:28:55 PM	Helium valve opened
11/3/2012	12:28:55 PM	Helium MFC set to  500.000000
11/3/2012	12:28:55 PM	H2 MFC set to  0.000000
11/3/2012	12:28:55 PM	BCl3 MFC set to  0.000000
11/3/2012	12:28:55 PM	PH3 MFC set to  0.000000
11/3/2012	12:28:55 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:28:55 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:28:55 PM	Tube furnace set to 0
11/3/2012	12:30:06 PM	Helium valve closed
11/3/2012	12:30:06 PM	H2 valve closed
11/3/2012	12:30:06 PM	BCl3 valve closed
11/3/2012	12:30:06 PM	PH3 valve closed
11/3/2012	12:30:06 PM	SiCl4 pre valve closed
11/3/2012	12:30:06 PM	SiCl4 post valve closed
11/3/2012	12:30:06 PM	Main Vac valve closed
11/3/2012	12:30:06 PM	Bypass valve closed
11/3/2012	12:30:06 PM	Bubbler valve closed
11/3/2012	12:30:06 PM	Helium MFC set to  0.000000
11/3/2012	12:30:06 PM	H2 MFC set to  0.000000
11/3/2012	12:30:06 PM	BCl3 MFC set to  0.000000
11/3/2012	12:30:06 PM	PH3 MFC set to  0.000000
11/3/2012	12:30:06 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:30:06 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:30:06 PM	Tube furnace set to 0
11/3/2012	12:30:07 PM	Run finished at 12:30 PM
11/3/2012	12:30:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2012	12:37:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2012	12:37:49 PM	Recipe started at 12:37 PM
11/3/2012	12:37:49 PM	Helium valve closed
11/3/2012	12:37:49 PM	H2 valve closed
11/3/2012	12:37:49 PM	BCl3 valve closed
11/3/2012	12:37:49 PM	PH3 valve closed
11/3/2012	12:37:49 PM	SiCl4 pre valve closed
11/3/2012	12:37:49 PM	SiCl4 post valve closed
11/3/2012	12:37:49 PM	Main Vac valve closed
11/3/2012	12:37:49 PM	Bypass valve closed
11/3/2012	12:37:49 PM	Bubbler valve closed
11/3/2012	12:37:49 PM	Helium MFC set to  0.000000
11/3/2012	12:37:49 PM	H2 MFC set to  0.000000
11/3/2012	12:37:49 PM	BCl3 MFC set to  0.000000
11/3/2012	12:37:49 PM	PH3 MFC set to  0.000000
11/3/2012	12:37:49 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:37:49 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:37:49 PM	Tube furnace set to 0
11/3/2012	12:37:52 PM	H2 valve closed
11/3/2012	12:37:52 PM	BCl3 valve closed
11/3/2012	12:37:52 PM	PH3 valve closed
11/3/2012	12:37:52 PM	SiCl4 pre valve closed
11/3/2012	12:37:52 PM	SiCl4 post valve closed
11/3/2012	12:37:52 PM	Main Vac valve closed
11/3/2012	12:37:52 PM	Bypass valve closed
11/3/2012	12:37:52 PM	Bubbler valve closed
11/3/2012	12:37:52 PM	Helium valve opened
11/3/2012	12:37:52 PM	Helium MFC set to  500.000000
11/3/2012	12:37:52 PM	H2 MFC set to  0.000000
11/3/2012	12:37:52 PM	BCl3 MFC set to  0.000000
11/3/2012	12:37:52 PM	PH3 MFC set to  0.000000
11/3/2012	12:37:52 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:37:52 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:37:53 PM	Tube furnace set to 0
11/3/2012	12:37:54 PM	Helium valve closed
11/3/2012	12:37:54 PM	H2 valve closed
11/3/2012	12:37:54 PM	BCl3 valve closed
11/3/2012	12:37:54 PM	PH3 valve closed
11/3/2012	12:37:54 PM	SiCl4 pre valve closed
11/3/2012	12:37:54 PM	SiCl4 post valve closed
11/3/2012	12:37:54 PM	Main Vac valve closed
11/3/2012	12:37:54 PM	Bypass valve closed
11/3/2012	12:37:54 PM	Bubbler valve closed
11/3/2012	12:37:54 PM	Helium MFC set to  0.000000
11/3/2012	12:37:54 PM	H2 MFC set to  0.000000
11/3/2012	12:37:54 PM	BCl3 MFC set to  0.000000
11/3/2012	12:37:54 PM	PH3 MFC set to  0.000000
11/3/2012	12:37:54 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:37:54 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:37:54 PM	Tube furnace set to 0
11/3/2012	12:37:55 PM	Run finished at 12:37 PM
11/3/2012	12:37:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2012	12:38:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2012	12:38:52 PM	Recipe started at 12:38 PM
11/3/2012	12:38:52 PM	Helium valve closed
11/3/2012	12:38:52 PM	H2 valve closed
11/3/2012	12:38:52 PM	BCl3 valve closed
11/3/2012	12:38:52 PM	PH3 valve closed
11/3/2012	12:38:52 PM	SiCl4 pre valve closed
11/3/2012	12:38:52 PM	SiCl4 post valve closed
11/3/2012	12:38:52 PM	Main Vac valve closed
11/3/2012	12:38:52 PM	Bypass valve closed
11/3/2012	12:38:52 PM	Bubbler valve closed
11/3/2012	12:38:52 PM	Helium MFC set to  0.000000
11/3/2012	12:38:52 PM	H2 MFC set to  0.000000
11/3/2012	12:38:52 PM	BCl3 MFC set to  0.000000
11/3/2012	12:38:52 PM	PH3 MFC set to  0.000000
11/3/2012	12:38:52 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:38:52 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:38:52 PM	Tube furnace set to 0
11/3/2012	12:38:55 PM	H2 valve closed
11/3/2012	12:38:55 PM	BCl3 valve closed
11/3/2012	12:38:55 PM	PH3 valve closed
11/3/2012	12:38:55 PM	SiCl4 pre valve closed
11/3/2012	12:38:55 PM	SiCl4 post valve closed
11/3/2012	12:38:55 PM	Main Vac valve closed
11/3/2012	12:38:55 PM	Bypass valve closed
11/3/2012	12:38:55 PM	Bubbler valve closed
11/3/2012	12:38:55 PM	Helium valve opened
11/3/2012	12:38:55 PM	Helium MFC set to  500.000000
11/3/2012	12:38:55 PM	H2 MFC set to  0.000000
11/3/2012	12:38:55 PM	BCl3 MFC set to  0.000000
11/3/2012	12:38:55 PM	PH3 MFC set to  0.000000
11/3/2012	12:38:55 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:38:55 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:38:55 PM	Tube furnace set to 0
11/3/2012	12:38:56 PM	Helium valve closed
11/3/2012	12:38:56 PM	H2 valve closed
11/3/2012	12:38:56 PM	BCl3 valve closed
11/3/2012	12:38:56 PM	PH3 valve closed
11/3/2012	12:38:56 PM	SiCl4 pre valve closed
11/3/2012	12:38:56 PM	SiCl4 post valve closed
11/3/2012	12:38:56 PM	Main Vac valve closed
11/3/2012	12:38:56 PM	Bypass valve closed
11/3/2012	12:38:56 PM	Bubbler valve closed
11/3/2012	12:38:56 PM	Helium MFC set to  0.000000
11/3/2012	12:38:56 PM	H2 MFC set to  0.000000
11/3/2012	12:38:56 PM	BCl3 MFC set to  0.000000
11/3/2012	12:38:56 PM	PH3 MFC set to  0.000000
11/3/2012	12:38:56 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:38:56 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:38:56 PM	Tube furnace set to 0
11/3/2012	12:38:57 PM	Run finished at 12:38 PM
11/3/2012	12:38:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2012	12:49:37 PM	Recipe started at 12:49 PM
11/3/2012	12:49:37 PM	Helium valve closed
11/3/2012	12:49:37 PM	H2 valve closed
11/3/2012	12:49:37 PM	BCl3 valve closed
11/3/2012	12:49:37 PM	PH3 valve closed
11/3/2012	12:49:37 PM	SiCl4 pre valve closed
11/3/2012	12:49:37 PM	SiCl4 post valve closed
11/3/2012	12:49:37 PM	Main Vac valve closed
11/3/2012	12:49:37 PM	Bypass valve closed
11/3/2012	12:49:37 PM	Bubbler valve closed
11/3/2012	12:49:37 PM	Helium MFC set to  0.000000
11/3/2012	12:49:37 PM	H2 MFC set to  0.000000
11/3/2012	12:49:37 PM	BCl3 MFC set to  0.000000
11/3/2012	12:49:37 PM	PH3 MFC set to  0.000000
11/3/2012	12:49:37 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:49:37 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:49:37 PM	Tube furnace set to 0
11/3/2012	12:49:40 PM	Helium valve closed
11/3/2012	12:49:40 PM	BCl3 valve closed
11/3/2012	12:49:40 PM	PH3 valve closed
11/3/2012	12:49:40 PM	SiCl4 pre valve closed
11/3/2012	12:49:40 PM	SiCl4 post valve closed
11/3/2012	12:49:40 PM	Main Vac valve closed
11/3/2012	12:49:40 PM	Bypass valve closed
11/3/2012	12:49:40 PM	Bubbler valve closed
11/3/2012	12:49:40 PM	H2 valve opened
11/3/2012	12:49:40 PM	Helium MFC set to  0.000000
11/3/2012	12:49:40 PM	H2 MFC set to  500.000000
11/3/2012	12:49:40 PM	BCl3 MFC set to  0.000000
11/3/2012	12:49:40 PM	PH3 MFC set to  0.000000
11/3/2012	12:49:40 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:49:40 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:49:40 PM	Tube furnace set to 0
11/3/2012	12:49:43 PM	Helium valve closed
11/3/2012	12:49:43 PM	BCl3 valve closed
11/3/2012	12:49:43 PM	PH3 valve closed
11/3/2012	12:49:43 PM	SiCl4 pre valve closed
11/3/2012	12:49:43 PM	SiCl4 post valve closed
11/3/2012	12:49:43 PM	Main Vac valve closed
11/3/2012	12:49:43 PM	Bypass valve closed
11/3/2012	12:49:43 PM	H2 valve opened
11/3/2012	12:49:43 PM	Bubbler valve opened
11/3/2012	12:49:43 PM	Helium MFC set to  0.000000
11/3/2012	12:49:43 PM	H2 MFC set to  500.000000
11/3/2012	12:49:43 PM	BCl3 MFC set to  0.000000
11/3/2012	12:49:43 PM	PH3 MFC set to  0.000000
11/3/2012	12:49:43 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:49:43 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:49:43 PM	Tube furnace set to 0
11/3/2012	12:49:44 PM	Helium valve closed
11/3/2012	12:49:44 PM	BCl3 valve closed
11/3/2012	12:49:44 PM	PH3 valve closed
11/3/2012	12:49:44 PM	SiCl4 pre valve closed
11/3/2012	12:49:44 PM	SiCl4 post valve closed
11/3/2012	12:49:44 PM	Main Vac valve closed
11/3/2012	12:49:44 PM	Bypass valve closed
11/3/2012	12:49:44 PM	H2 valve opened
11/3/2012	12:49:44 PM	Bubbler valve opened
11/3/2012	12:49:44 PM	Helium MFC set to  0.000000
11/3/2012	12:49:44 PM	H2 MFC set to  500.000000
11/3/2012	12:49:44 PM	BCl3 MFC set to  0.000000
11/3/2012	12:49:44 PM	PH3 MFC set to  0.000000
11/3/2012	12:49:44 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:49:44 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:49:45 PM	Tube furnace set to 200
11/3/2012	12:52:45 PM	Helium valve closed
11/3/2012	12:52:45 PM	PH3 valve closed
11/3/2012	12:52:45 PM	Main Vac valve closed
11/3/2012	12:52:45 PM	Bypass valve closed
11/3/2012	12:52:45 PM	H2 valve opened
11/3/2012	12:52:45 PM	BCl3 valve opened
11/3/2012	12:52:45 PM	SiCl4 pre valve opened
11/3/2012	12:52:45 PM	SiCl4 post valve opened
11/3/2012	12:52:45 PM	Bubbler valve opened
11/3/2012	12:52:45 PM	Helium MFC set to  0.000000
11/3/2012	12:52:45 PM	H2 MFC set to  450.000000
11/3/2012	12:52:45 PM	BCl3 MFC set to  1.300000
11/3/2012	12:52:45 PM	PH3 MFC set to  0.000000
11/3/2012	12:52:45 PM	SiCl4 MFC set to  50.000000
11/3/2012	12:52:45 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:52:45 PM	Tube furnace set to 200
11/3/2012	12:52:45 PM	Helium valve closed
11/3/2012	12:52:45 PM	H2 valve closed
11/3/2012	12:52:45 PM	BCl3 valve closed
11/3/2012	12:52:45 PM	PH3 valve closed
11/3/2012	12:52:45 PM	SiCl4 pre valve closed
11/3/2012	12:52:45 PM	SiCl4 post valve closed
11/3/2012	12:52:45 PM	Main Vac valve closed
11/3/2012	12:52:45 PM	Bubbler valve closed
11/3/2012	12:52:45 PM	Bypass valve closed
11/3/2012	12:52:45 PM	Helium MFC set to  0.000000
11/3/2012	12:52:45 PM	H2 MFC set to  0.000000
11/3/2012	12:52:45 PM	BCl3 MFC set to  0.000000
11/3/2012	12:52:45 PM	PH3 MFC set to  0.000000
11/3/2012	12:52:45 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:52:45 PM	Bypass solenoid MFC set to  760.000000
11/3/2012	12:52:45 PM	Tube furnace set to 0
11/3/2012	12:52:45 PM	Baratron reads 574.923354 Torr and NaOH valve is open.  Emergency exit.
11/3/2012	12:53:10 PM	Run aborted at 12:53 PM
11/3/2012	12:53:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2012	12:53:19 PM	Recipe started at 12:53 PM
11/3/2012	12:53:19 PM	Helium valve closed
11/3/2012	12:53:19 PM	H2 valve closed
11/3/2012	12:53:19 PM	BCl3 valve closed
11/3/2012	12:53:19 PM	PH3 valve closed
11/3/2012	12:53:19 PM	SiCl4 pre valve closed
11/3/2012	12:53:19 PM	SiCl4 post valve closed
11/3/2012	12:53:19 PM	Main Vac valve closed
11/3/2012	12:53:19 PM	Bypass valve closed
11/3/2012	12:53:19 PM	Bubbler valve closed
11/3/2012	12:53:19 PM	Helium MFC set to  0.000000
11/3/2012	12:53:19 PM	H2 MFC set to  0.000000
11/3/2012	12:53:19 PM	BCl3 MFC set to  0.000000
11/3/2012	12:53:19 PM	PH3 MFC set to  0.000000
11/3/2012	12:53:19 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:53:19 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:53:19 PM	Tube furnace set to 0
11/3/2012	12:53:22 PM	H2 valve closed
11/3/2012	12:53:22 PM	BCl3 valve closed
11/3/2012	12:53:22 PM	PH3 valve closed
11/3/2012	12:53:22 PM	SiCl4 pre valve closed
11/3/2012	12:53:22 PM	SiCl4 post valve closed
11/3/2012	12:53:22 PM	Main Vac valve closed
11/3/2012	12:53:22 PM	Bypass valve closed
11/3/2012	12:53:22 PM	Bubbler valve closed
11/3/2012	12:53:22 PM	Helium valve opened
11/3/2012	12:53:22 PM	Helium MFC set to  500.000000
11/3/2012	12:53:22 PM	H2 MFC set to  0.000000
11/3/2012	12:53:22 PM	BCl3 MFC set to  0.000000
11/3/2012	12:53:22 PM	PH3 MFC set to  0.000000
11/3/2012	12:53:22 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:53:22 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:53:22 PM	Tube furnace set to 0
11/3/2012	12:53:37 PM	Helium valve closed
11/3/2012	12:53:37 PM	H2 valve closed
11/3/2012	12:53:37 PM	BCl3 valve closed
11/3/2012	12:53:37 PM	PH3 valve closed
11/3/2012	12:53:37 PM	SiCl4 pre valve closed
11/3/2012	12:53:37 PM	SiCl4 post valve closed
11/3/2012	12:53:37 PM	Main Vac valve closed
11/3/2012	12:53:37 PM	Bypass valve closed
11/3/2012	12:53:37 PM	Bubbler valve closed
11/3/2012	12:53:37 PM	Helium MFC set to  0.000000
11/3/2012	12:53:37 PM	H2 MFC set to  0.000000
11/3/2012	12:53:37 PM	BCl3 MFC set to  0.000000
11/3/2012	12:53:37 PM	PH3 MFC set to  0.000000
11/3/2012	12:53:37 PM	SiCl4 MFC set to  0.000000
11/3/2012	12:53:37 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	12:53:37 PM	Tube furnace set to 0
11/3/2012	12:53:38 PM	Run finished at 12:53 PM
11/3/2012	12:53:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2012	12:55:46 PM	Helium MFC set to  25.000000
11/3/2012	12:56:00 PM	Helium valve opened
11/3/2012	12:56:43 PM	Helium valve closed
11/3/2012	12:56:48 PM	SiCl4 post valve opened
11/3/2012	12:56:48 PM	SiCl4 post valve closed
11/3/2012	12:56:48 PM	SiCl4 post valve opened
11/3/2012	12:56:52 PM	SiCl4 post valve closed
11/3/2012	12:57:40 PM	Helium MFC set to  100.000000
11/3/2012	12:57:42 PM	Helium valve opened
11/3/2012	12:58:34 PM	Helium valve closed
11/3/2012	12:58:46 PM	Helium valve opened
11/3/2012	12:58:53 PM	Helium valve closed
11/3/2012	12:58:56 PM	SiCl4 post valve opened
11/3/2012	12:58:56 PM	SiCl4 post valve closed
11/3/2012	12:59:02 PM	Helium valve opened
11/3/2012	12:59:34 PM	Helium valve closed
11/3/2012	12:59:36 PM	SiCl4 post valve opened
11/3/2012	12:59:36 PM	SiCl4 post valve closed
11/3/2012	12:59:48 PM	Helium valve opened
11/3/2012	1:00:05 PM	Helium valve closed
11/3/2012	1:00:09 PM	SiCl4 post valve opened
11/3/2012	1:00:09 PM	SiCl4 post valve closed
11/3/2012	1:00:28 PM	Helium MFC set to  0.000000
11/3/2012	1:00:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2012	1:00:38 PM	Recipe started at 1:00 PM
11/3/2012	1:00:38 PM	Helium valve closed
11/3/2012	1:00:38 PM	H2 valve closed
11/3/2012	1:00:38 PM	BCl3 valve closed
11/3/2012	1:00:38 PM	PH3 valve closed
11/3/2012	1:00:38 PM	SiCl4 pre valve closed
11/3/2012	1:00:38 PM	SiCl4 post valve closed
11/3/2012	1:00:38 PM	Main Vac valve closed
11/3/2012	1:00:39 PM	Bubbler valve closed
11/3/2012	1:00:39 PM	Bypass valve opened
11/3/2012	1:00:39 PM	Helium MFC set to  0.000000
11/3/2012	1:00:39 PM	H2 MFC set to  0.000000
11/3/2012	1:00:39 PM	BCl3 MFC set to  0.000000
11/3/2012	1:00:39 PM	PH3 MFC set to  0.000000
11/3/2012	1:00:39 PM	SiCl4 MFC set to  0.000000
11/3/2012	1:00:39 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	1:00:39 PM	Tube furnace set to 0
11/3/2012	1:00:58 PM	Run aborted at 1:00 PM
11/3/2012	1:00:58 PM	Helium valve closed
11/3/2012	1:00:58 PM	H2 valve closed
11/3/2012	1:00:58 PM	BCl3 valve closed
11/3/2012	1:00:58 PM	PH3 valve closed
11/3/2012	1:00:58 PM	SiCl4 pre valve closed
11/3/2012	1:00:58 PM	SiCl4 post valve closed
11/3/2012	1:00:58 PM	Bypass valve closed
11/3/2012	1:00:58 PM	Main Vac valve closed
11/3/2012	1:00:58 PM	Bubbler valve closed
11/3/2012	1:00:58 PM	Helium MFC set to  0.000000
11/3/2012	1:00:58 PM	H2 MFC set to  0.000000
11/3/2012	1:00:58 PM	BCl3 MFC set to  0.000000
11/3/2012	1:00:58 PM	PH3 MFC set to  0.000000
11/3/2012	1:00:58 PM	SiCl4 MFC set to  0.000000
11/3/2012	1:00:58 PM	Tube furnace set to 0
11/3/2012	1:00:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2012	1:01:46 PM	Recipe started at 1:01 PM
11/3/2012	1:01:46 PM	Helium valve closed
11/3/2012	1:01:46 PM	H2 valve closed
11/3/2012	1:01:46 PM	BCl3 valve closed
11/3/2012	1:01:46 PM	PH3 valve closed
11/3/2012	1:01:46 PM	SiCl4 pre valve closed
11/3/2012	1:01:46 PM	SiCl4 post valve closed
11/3/2012	1:01:46 PM	Main Vac valve closed
11/3/2012	1:01:46 PM	Bypass valve closed
11/3/2012	1:01:46 PM	Bubbler valve closed
11/3/2012	1:01:46 PM	Helium MFC set to  0.000000
11/3/2012	1:01:46 PM	H2 MFC set to  0.000000
11/3/2012	1:01:46 PM	BCl3 MFC set to  0.000000
11/3/2012	1:01:46 PM	PH3 MFC set to  0.000000
11/3/2012	1:01:46 PM	SiCl4 MFC set to  0.000000
11/3/2012	1:01:46 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	1:01:46 PM	Tube furnace set to 0
11/3/2012	1:01:49 PM	Helium valve closed
11/3/2012	1:01:49 PM	BCl3 valve closed
11/3/2012	1:01:50 PM	PH3 valve closed
11/3/2012	1:01:50 PM	SiCl4 pre valve closed
11/3/2012	1:01:50 PM	SiCl4 post valve closed
11/3/2012	1:01:50 PM	Main Vac valve closed
11/3/2012	1:01:50 PM	Bypass valve closed
11/3/2012	1:01:50 PM	Bubbler valve closed
11/3/2012	1:01:50 PM	H2 valve opened
11/3/2012	1:01:50 PM	Helium MFC set to  0.000000
11/3/2012	1:01:50 PM	H2 MFC set to  500.000000
11/3/2012	1:01:50 PM	BCl3 MFC set to  0.000000
11/3/2012	1:01:50 PM	PH3 MFC set to  0.000000
11/3/2012	1:01:50 PM	SiCl4 MFC set to  0.000000
11/3/2012	1:01:50 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	1:01:50 PM	Tube furnace set to 0
11/3/2012	1:02:59 PM	Helium valve closed
11/3/2012	1:02:59 PM	BCl3 valve closed
11/3/2012	1:02:59 PM	PH3 valve closed
11/3/2012	1:02:59 PM	SiCl4 pre valve closed
11/3/2012	1:03:00 PM	SiCl4 post valve closed
11/3/2012	1:03:00 PM	Main Vac valve closed
11/3/2012	1:03:00 PM	Bypass valve closed
11/3/2012	1:03:00 PM	H2 valve opened
11/3/2012	1:03:00 PM	Bubbler valve opened
11/3/2012	1:03:00 PM	Helium MFC set to  0.000000
11/3/2012	1:03:00 PM	H2 MFC set to  500.000000
11/3/2012	1:03:00 PM	BCl3 MFC set to  0.000000
11/3/2012	1:03:00 PM	PH3 MFC set to  0.000000
11/3/2012	1:03:00 PM	SiCl4 MFC set to  0.000000
11/3/2012	1:03:00 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	1:03:00 PM	Tube furnace set to 0
11/3/2012	1:03:01 PM	Helium valve closed
11/3/2012	1:03:01 PM	BCl3 valve closed
11/3/2012	1:03:01 PM	PH3 valve closed
11/3/2012	1:03:01 PM	SiCl4 pre valve closed
11/3/2012	1:03:01 PM	SiCl4 post valve closed
11/3/2012	1:03:01 PM	Main Vac valve closed
11/3/2012	1:03:01 PM	Bypass valve closed
11/3/2012	1:03:01 PM	H2 valve opened
11/3/2012	1:03:01 PM	Bubbler valve opened
11/3/2012	1:03:01 PM	Helium MFC set to  0.000000
11/3/2012	1:03:01 PM	H2 MFC set to  500.000000
11/3/2012	1:03:01 PM	BCl3 MFC set to  0.000000
11/3/2012	1:03:01 PM	PH3 MFC set to  0.000000
11/3/2012	1:03:01 PM	SiCl4 MFC set to  0.000000
11/3/2012	1:03:01 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	1:03:01 PM	Tube furnace set to 200
11/3/2012	1:06:01 PM	Helium valve closed
11/3/2012	1:06:01 PM	PH3 valve closed
11/3/2012	1:06:01 PM	Main Vac valve closed
11/3/2012	1:06:01 PM	Bypass valve closed
11/3/2012	1:06:01 PM	H2 valve opened
11/3/2012	1:06:01 PM	BCl3 valve opened
11/3/2012	1:06:01 PM	SiCl4 pre valve opened
11/3/2012	1:06:01 PM	SiCl4 post valve opened
11/3/2012	1:06:01 PM	Bubbler valve opened
11/3/2012	1:06:01 PM	Helium MFC set to  0.000000
11/3/2012	1:06:01 PM	H2 MFC set to  450.000000
11/3/2012	1:06:01 PM	BCl3 MFC set to  1.300000
11/3/2012	1:06:01 PM	PH3 MFC set to  0.000000
11/3/2012	1:06:01 PM	SiCl4 MFC set to  50.000000
11/3/2012	1:06:01 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	1:06:01 PM	Tube furnace set to 200
11/3/2012	1:06:43 PM	Helium valve closed
11/3/2012	1:06:43 PM	BCl3 valve closed
11/3/2012	1:06:43 PM	PH3 valve closed
11/3/2012	1:06:43 PM	SiCl4 pre valve closed
11/3/2012	1:06:43 PM	SiCl4 post valve closed
11/3/2012	1:06:43 PM	Main Vac valve closed
11/3/2012	1:06:43 PM	Bypass valve closed
11/3/2012	1:06:43 PM	H2 valve opened
11/3/2012	1:06:43 PM	Bubbler valve opened
11/3/2012	1:06:43 PM	Helium MFC set to  0.000000
11/3/2012	1:06:43 PM	H2 MFC set to  500.000000
11/3/2012	1:06:43 PM	BCl3 MFC set to  0.000000
11/3/2012	1:06:43 PM	PH3 MFC set to  0.000000
11/3/2012	1:06:43 PM	SiCl4 MFC set to  0.000000
11/3/2012	1:06:43 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	1:06:43 PM	Tube furnace set to 200
11/3/2012	1:11:43 PM	H2 valve closed
11/3/2012	1:11:43 PM	BCl3 valve closed
11/3/2012	1:11:43 PM	PH3 valve closed
11/3/2012	1:11:43 PM	SiCl4 pre valve closed
11/3/2012	1:11:43 PM	SiCl4 post valve closed
11/3/2012	1:11:43 PM	Main Vac valve closed
11/3/2012	1:11:43 PM	Bypass valve closed
11/3/2012	1:11:43 PM	Helium valve opened
11/3/2012	1:11:43 PM	Bubbler valve opened
11/3/2012	1:11:43 PM	Helium MFC set to  500.000000
11/3/2012	1:11:43 PM	H2 MFC set to  0.000000
11/3/2012	1:11:43 PM	BCl3 MFC set to  0.000000
11/3/2012	1:11:43 PM	PH3 MFC set to  0.000000
11/3/2012	1:11:43 PM	SiCl4 MFC set to  0.000000
11/3/2012	1:11:43 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	1:11:43 PM	Tube furnace set to 0
11/3/2012	1:16:43 PM	Helium valve closed
11/3/2012	1:16:43 PM	H2 valve closed
11/3/2012	1:16:43 PM	BCl3 valve closed
11/3/2012	1:16:43 PM	PH3 valve closed
11/3/2012	1:16:43 PM	SiCl4 pre valve closed
11/3/2012	1:16:43 PM	SiCl4 post valve closed
11/3/2012	1:16:43 PM	Main Vac valve closed
11/3/2012	1:16:43 PM	Bypass valve closed
11/3/2012	1:16:43 PM	Bubbler valve closed
11/3/2012	1:16:43 PM	Helium MFC set to  0.000000
11/3/2012	1:16:43 PM	H2 MFC set to  0.000000
11/3/2012	1:16:43 PM	BCl3 MFC set to  0.000000
11/3/2012	1:16:43 PM	PH3 MFC set to  0.000000
11/3/2012	1:16:43 PM	SiCl4 MFC set to  0.000000
11/3/2012	1:16:43 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	1:16:43 PM	Tube furnace set to 0
11/3/2012	1:16:44 PM	Run finished at 1:16 PM
11/3/2012	1:20:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2012	1:20:43 PM	Recipe started at 1:20 PM
11/3/2012	1:20:43 PM	Helium valve closed
11/3/2012	1:20:43 PM	H2 valve closed
11/3/2012	1:20:43 PM	BCl3 valve closed
11/3/2012	1:20:43 PM	PH3 valve closed
11/3/2012	1:20:43 PM	SiCl4 pre valve closed
11/3/2012	1:20:43 PM	SiCl4 post valve closed
11/3/2012	1:20:43 PM	Main Vac valve closed
11/3/2012	1:20:43 PM	Bubbler valve closed
11/3/2012	1:20:43 PM	Bypass valve opened
11/3/2012	1:20:43 PM	Helium MFC set to  0.000000
11/3/2012	1:20:43 PM	H2 MFC set to  0.000000
11/3/2012	1:20:43 PM	BCl3 MFC set to  0.000000
11/3/2012	1:20:43 PM	PH3 MFC set to  0.000000
11/3/2012	1:20:43 PM	SiCl4 MFC set to  0.000000
11/3/2012	1:20:43 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	1:20:43 PM	Tube furnace set to 0
11/3/2012	1:21:44 PM	Helium valve closed
11/3/2012	1:21:44 PM	H2 valve closed
11/3/2012	1:21:44 PM	BCl3 valve closed
11/3/2012	1:21:44 PM	PH3 valve closed
11/3/2012	1:21:44 PM	SiCl4 pre valve closed
11/3/2012	1:21:44 PM	SiCl4 post valve closed
11/3/2012	1:21:44 PM	Main Vac valve closed
11/3/2012	1:21:44 PM	Bubbler valve closed
11/3/2012	1:21:44 PM	Bypass valve opened
11/3/2012	1:21:44 PM	Helium MFC set to  0.000000
11/3/2012	1:21:44 PM	H2 MFC set to  0.000000
11/3/2012	1:21:44 PM	BCl3 MFC set to  0.000000
11/3/2012	1:21:44 PM	PH3 MFC set to  0.000000
11/3/2012	1:21:44 PM	SiCl4 MFC set to  0.000000
11/3/2012	1:21:44 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	1:21:44 PM	Tube furnace set to 0
11/3/2012	1:22:44 PM	Helium valve closed
11/3/2012	1:22:44 PM	H2 valve closed
11/3/2012	1:22:44 PM	BCl3 valve closed
11/3/2012	1:22:44 PM	PH3 valve closed
11/3/2012	1:22:44 PM	SiCl4 pre valve closed
11/3/2012	1:22:44 PM	SiCl4 post valve closed
11/3/2012	1:22:44 PM	Bypass valve closed
11/3/2012	1:22:44 PM	Bubbler valve closed
11/3/2012	1:22:44 PM	Main Vac valve opened
11/3/2012	1:22:44 PM	Helium MFC set to  0.000000
11/3/2012	1:22:45 PM	H2 MFC set to  0.000000
11/3/2012	1:22:45 PM	BCl3 MFC set to  0.000000
11/3/2012	1:22:45 PM	PH3 MFC set to  0.000000
11/3/2012	1:22:45 PM	SiCl4 MFC set to  0.000000
11/3/2012	1:22:45 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	1:22:45 PM	Tube furnace set to 0
11/3/2012	1:22:46 PM	Run finished at 1:22 PM
11/3/2012	1:22:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2012	1:29:28 PM	Recipe started at 1:29 PM
11/3/2012	1:29:28 PM	Helium valve closed
11/3/2012	1:29:28 PM	H2 valve closed
11/3/2012	1:29:28 PM	BCl3 valve closed
11/3/2012	1:29:28 PM	PH3 valve closed
11/3/2012	1:29:28 PM	SiCl4 pre valve closed
11/3/2012	1:29:28 PM	SiCl4 post valve closed
11/3/2012	1:29:28 PM	Main Vac valve closed
11/3/2012	1:29:28 PM	Bypass valve closed
11/3/2012	1:29:28 PM	Bubbler valve closed
11/3/2012	1:29:28 PM	Helium MFC set to  0.000000
11/3/2012	1:29:28 PM	H2 MFC set to  0.000000
11/3/2012	1:29:28 PM	BCl3 MFC set to  0.000000
11/3/2012	1:29:28 PM	PH3 MFC set to  0.000000
11/3/2012	1:29:28 PM	SiCl4 MFC set to  0.000000
11/3/2012	1:29:28 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	1:29:28 PM	Tube furnace set to 0
11/3/2012	1:29:31 PM	Helium valve closed
11/3/2012	1:29:31 PM	BCl3 valve closed
11/3/2012	1:29:31 PM	PH3 valve closed
11/3/2012	1:29:31 PM	SiCl4 pre valve closed
11/3/2012	1:29:31 PM	SiCl4 post valve closed
11/3/2012	1:29:31 PM	Main Vac valve closed
11/3/2012	1:29:31 PM	Bypass valve closed
11/3/2012	1:29:31 PM	Bubbler valve closed
11/3/2012	1:29:31 PM	H2 valve opened
11/3/2012	1:29:31 PM	Helium MFC set to  0.000000
11/3/2012	1:29:31 PM	H2 MFC set to  500.000000
11/3/2012	1:29:31 PM	BCl3 MFC set to  0.000000
11/3/2012	1:29:31 PM	PH3 MFC set to  0.000000
11/3/2012	1:29:31 PM	SiCl4 MFC set to  0.000000
11/3/2012	1:29:31 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	1:29:31 PM	Tube furnace set to 0
11/3/2012	1:30:44 PM	Helium valve closed
11/3/2012	1:30:44 PM	BCl3 valve closed
11/3/2012	1:30:44 PM	PH3 valve closed
11/3/2012	1:30:44 PM	SiCl4 pre valve closed
11/3/2012	1:30:44 PM	SiCl4 post valve closed
11/3/2012	1:30:44 PM	Main Vac valve closed
11/3/2012	1:30:44 PM	Bypass valve closed
11/3/2012	1:30:44 PM	H2 valve opened
11/3/2012	1:30:44 PM	Bubbler valve opened
11/3/2012	1:30:44 PM	Helium MFC set to  0.000000
11/3/2012	1:30:44 PM	H2 MFC set to  500.000000
11/3/2012	1:30:44 PM	BCl3 MFC set to  0.000000
11/3/2012	1:30:44 PM	PH3 MFC set to  0.000000
11/3/2012	1:30:44 PM	SiCl4 MFC set to  0.000000
11/3/2012	1:30:44 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	1:30:45 PM	Tube furnace set to 0
11/3/2012	1:30:46 PM	Helium valve closed
11/3/2012	1:30:46 PM	BCl3 valve closed
11/3/2012	1:30:46 PM	PH3 valve closed
11/3/2012	1:30:46 PM	SiCl4 pre valve closed
11/3/2012	1:30:46 PM	SiCl4 post valve closed
11/3/2012	1:30:46 PM	Main Vac valve closed
11/3/2012	1:30:46 PM	Bypass valve closed
11/3/2012	1:30:46 PM	H2 valve opened
11/3/2012	1:30:46 PM	Bubbler valve opened
11/3/2012	1:30:46 PM	Helium MFC set to  0.000000
11/3/2012	1:30:46 PM	H2 MFC set to  500.000000
11/3/2012	1:30:46 PM	BCl3 MFC set to  0.000000
11/3/2012	1:30:46 PM	PH3 MFC set to  0.000000
11/3/2012	1:30:46 PM	SiCl4 MFC set to  0.000000
11/3/2012	1:30:46 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	1:30:46 PM	Tube furnace set to 1000
11/3/2012	1:50:46 PM	Helium valve closed
11/3/2012	1:50:46 PM	PH3 valve closed
11/3/2012	1:50:46 PM	Main Vac valve closed
11/3/2012	1:50:46 PM	Bypass valve closed
11/3/2012	1:50:46 PM	H2 valve opened
11/3/2012	1:50:46 PM	BCl3 valve opened
11/3/2012	1:50:46 PM	SiCl4 pre valve opened
11/3/2012	1:50:46 PM	SiCl4 post valve opened
11/3/2012	1:50:46 PM	Bubbler valve opened
11/3/2012	1:50:46 PM	Helium MFC set to  0.000000
11/3/2012	1:50:46 PM	H2 MFC set to  450.000000
11/3/2012	1:50:46 PM	BCl3 MFC set to  1.300000
11/3/2012	1:50:46 PM	PH3 MFC set to  0.000000
11/3/2012	1:50:46 PM	SiCl4 MFC set to  50.000000
11/3/2012	1:50:46 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	1:50:46 PM	Tube furnace set to 1000
11/3/2012	2:07:46 PM	Helium valve closed
11/3/2012	2:07:46 PM	BCl3 valve closed
11/3/2012	2:07:46 PM	PH3 valve closed
11/3/2012	2:07:46 PM	SiCl4 pre valve closed
11/3/2012	2:07:46 PM	SiCl4 post valve closed
11/3/2012	2:07:46 PM	Main Vac valve closed
11/3/2012	2:07:46 PM	Bypass valve closed
11/3/2012	2:07:46 PM	H2 valve opened
11/3/2012	2:07:46 PM	Bubbler valve opened
11/3/2012	2:07:46 PM	Helium MFC set to  0.000000
11/3/2012	2:07:46 PM	H2 MFC set to  500.000000
11/3/2012	2:07:46 PM	BCl3 MFC set to  0.000000
11/3/2012	2:07:46 PM	PH3 MFC set to  0.000000
11/3/2012	2:07:46 PM	SiCl4 MFC set to  0.000000
11/3/2012	2:07:46 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	2:07:46 PM	Tube furnace set to 750
11/3/2012	2:12:46 PM	H2 valve closed
11/3/2012	2:12:46 PM	BCl3 valve closed
11/3/2012	2:12:46 PM	PH3 valve closed
11/3/2012	2:12:46 PM	SiCl4 pre valve closed
11/3/2012	2:12:46 PM	SiCl4 post valve closed
11/3/2012	2:12:46 PM	Main Vac valve closed
11/3/2012	2:12:46 PM	Bypass valve closed
11/3/2012	2:12:46 PM	Helium valve opened
11/3/2012	2:12:46 PM	Bubbler valve opened
11/3/2012	2:12:46 PM	Helium MFC set to  500.000000
11/3/2012	2:12:46 PM	H2 MFC set to  0.000000
11/3/2012	2:12:46 PM	BCl3 MFC set to  0.000000
11/3/2012	2:12:46 PM	PH3 MFC set to  0.000000
11/3/2012	2:12:46 PM	SiCl4 MFC set to  0.000000
11/3/2012	2:12:46 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	2:12:46 PM	Tube furnace set to 0
11/3/2012	2:32:46 PM	Helium valve closed
11/3/2012	2:32:46 PM	H2 valve closed
11/3/2012	2:32:46 PM	BCl3 valve closed
11/3/2012	2:32:46 PM	PH3 valve closed
11/3/2012	2:32:46 PM	SiCl4 pre valve closed
11/3/2012	2:32:46 PM	SiCl4 post valve closed
11/3/2012	2:32:46 PM	Main Vac valve closed
11/3/2012	2:32:46 PM	Bypass valve closed
11/3/2012	2:32:46 PM	Bubbler valve closed
11/3/2012	2:32:46 PM	Helium MFC set to  0.000000
11/3/2012	2:32:46 PM	H2 MFC set to  0.000000
11/3/2012	2:32:46 PM	BCl3 MFC set to  0.000000
11/3/2012	2:32:46 PM	PH3 MFC set to  0.000000
11/3/2012	2:32:46 PM	SiCl4 MFC set to  0.000000
11/3/2012	2:32:46 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	2:32:47 PM	Tube furnace set to 0
11/3/2012	2:32:48 PM	Run finished at 2:32 PM
11/3/2012	2:49:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2012	2:49:18 PM	Recipe started at 2:49 PM
11/3/2012	2:49:18 PM	Helium valve closed
11/3/2012	2:49:18 PM	H2 valve closed
11/3/2012	2:49:18 PM	BCl3 valve closed
11/3/2012	2:49:18 PM	PH3 valve closed
11/3/2012	2:49:18 PM	SiCl4 pre valve closed
11/3/2012	2:49:18 PM	SiCl4 post valve closed
11/3/2012	2:49:18 PM	Main Vac valve closed
11/3/2012	2:49:18 PM	Bubbler valve closed
11/3/2012	2:49:18 PM	Bypass valve opened
11/3/2012	2:49:18 PM	Helium MFC set to  0.000000
11/3/2012	2:49:18 PM	H2 MFC set to  0.000000
11/3/2012	2:49:18 PM	BCl3 MFC set to  0.000000
11/3/2012	2:49:18 PM	PH3 MFC set to  0.000000
11/3/2012	2:49:18 PM	SiCl4 MFC set to  0.000000
11/3/2012	2:49:18 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	2:49:18 PM	Tube furnace set to 0
11/3/2012	2:50:42 PM	Helium valve closed
11/3/2012	2:50:42 PM	H2 valve closed
11/3/2012	2:50:42 PM	BCl3 valve closed
11/3/2012	2:50:42 PM	PH3 valve closed
11/3/2012	2:50:42 PM	SiCl4 pre valve closed
11/3/2012	2:50:42 PM	SiCl4 post valve closed
11/3/2012	2:50:42 PM	Main Vac valve closed
11/3/2012	2:50:42 PM	Bubbler valve closed
11/3/2012	2:50:42 PM	Bypass valve opened
11/3/2012	2:50:42 PM	Helium MFC set to  0.000000
11/3/2012	2:50:42 PM	H2 MFC set to  0.000000
11/3/2012	2:50:42 PM	BCl3 MFC set to  0.000000
11/3/2012	2:50:42 PM	PH3 MFC set to  0.000000
11/3/2012	2:50:42 PM	SiCl4 MFC set to  0.000000
11/3/2012	2:50:42 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	2:50:42 PM	Tube furnace set to 0
11/3/2012	2:51:42 PM	Helium valve closed
11/3/2012	2:51:42 PM	H2 valve closed
11/3/2012	2:51:42 PM	BCl3 valve closed
11/3/2012	2:51:42 PM	PH3 valve closed
11/3/2012	2:51:42 PM	SiCl4 pre valve closed
11/3/2012	2:51:42 PM	SiCl4 post valve closed
11/3/2012	2:51:42 PM	Bypass valve closed
11/3/2012	2:51:42 PM	Bubbler valve closed
11/3/2012	2:51:42 PM	Main Vac valve opened
11/3/2012	2:51:42 PM	Helium MFC set to  0.000000
11/3/2012	2:51:42 PM	H2 MFC set to  0.000000
11/3/2012	2:51:42 PM	BCl3 MFC set to  0.000000
11/3/2012	2:51:42 PM	PH3 MFC set to  0.000000
11/3/2012	2:51:42 PM	SiCl4 MFC set to  0.000000
11/3/2012	2:51:42 PM	Bypass solenoid MFC set to  0.000000
11/3/2012	2:51:42 PM	Tube furnace set to 0
11/3/2012	2:51:43 PM	Run finished at 2:51 PM
11/3/2012	2:51:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
